USPTO Patents Application 10507392

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2003 ^9^110 (11.09.2003)

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DM, DZ, EC, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU,

= (54) Title: LASER BEAM MACHINING METHOD

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(57) Abstract: The invention provides a laser beam machining
method characterized by comprising the steps of mounting a
protective tape (25) on the surface (3) of a wafer (la), radiating
laser light (L) by using the back (21) of a wafer (la) as a laser light
incidence plane with an optical converging point (P) positioned in
a substrate (15) to thereby form a melt processing region (13) for
melt processing by multiphoton absorption, forming, by means of
the melt processing region (13), a cutting start region (8) on the side
within a predetermined distance from the laser light incidence plane
along a predetermined cutting line (5) on the wafer (la), mounting
an expand tape (23) on the back (21) of the wafer (la), and stretching
the expand tape (23) to thereby separate a plurality of chip-like
portions (24) from each other that are formed by the wafer (la) being
cut with the cutting start region (8) used as the starting point.

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ID, EL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT,
LU, LV, MA, MD, MG, MX, MN, MW, MX, MZ, NT, NO,
NZ, OM, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL,
TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU,
ZA, ZM, ZW.

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(AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB,

GR, HU, IE, IT, LU, MC, NL, PT, RO, SE, SI, SK, TR),
OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW,
ML, MR, NE, SN, TD, TG).

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PCT/JP2003/011626

( ■» )

-S61
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INTERNATIONAL SEARCH REPORT

International application No.

PCT/JP03/11626

A. CLASSIFICATION OF SUBJECT MATTER

Int. CI 7 H01L21/301, B28D5/00, B23K26/38, B23K101:40

According to International Patent Classification (IPQ or to both national classification and IPC
B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols)

Int. CI 7 H01L21/301, B28D5/00, B23K26/38, B23K101:40

Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched
Jitsuyo Shinan Kbho 1922-1996 Toroku Jitsuyo Shinan Kbho 1994-2003

Kokai Jitsuyo Shinan Koho 1971-2003 Jitsuyo Shinan Toroku Kbho 1996-2003

Electronic data base consulted during the international search (name of data base and, where practicable, search terms used)

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category*

Citation of document, with indication, where appropriate, of the relevant passages

Relevant to claim No.

JP 2002-192370 A (Hamamatsu Photonics Kabushiki
Kaisha) ,

10 July, 2002 (i0. 07.02),
Full text; all drawings
& EP 1338371 Al

JP 9-17756 A (Toshiba Corp.),
17 January, 1997 (17.01.97),
Par. Nos. [0002], [0026] to [0034]
(Family: none)

JP 2002-226796 A (Hitachi Chemical Co., Ltd.),
14 August, 2002 (14.08.02),
Par. No. [0112]; Fig. 6
(Family: none)

1-9

1-9

1-9

fx] Further documents are listed in the continuation of Box C. [^] See patent family annex.

* Special categories of cited documents: i
"A" document defining the general state of the art which is not

considered to be of particular relevance
"IT earlier document but published on or after the international filing "X"

date

"L" document which may throw doubts on priority claim(s) or which is

cited to establish the publication date of another citation or other "Y"
special reason (as specified)

a O" document referring lo an oral disclosure, use, exhibition or other
means

"P" document published prior to the international filing date but later

later document published after the international filing date or
priority date and not in conflict with the application but cited to
understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be
considered novel or cannot be considered to involve an inventive
step when the document is taken alone

document of particular relevance; the claimed invention cannot be
considered to involve an inventive step when the document is
combined with one or more other such documents, such
combination being obvious to a person skilled in the art
document member of the same patent family

Date of the actual completion of the international search
17 December, 2003 (17.12.03)

Date of mailing of the international search report

13 January, 2004 (13.01.04)

Name and mailing address of the ISA/

Japanese Patent Office

Facsimile No.

Authorized officer
Telephone No.

Form PCT/ISA/210 (second sheet) (July 1998)

INTERNATIONAL SEARCH REPORT

International application No.

PCT/JP03/11626

C (Continuation). DOCUMENTS CONSIDERED TO BE RELEVANT

Category*

Citation of document, with indication, where appropriate, of the relevant passages

Relevant to claim No.

Y

JP 7-37840 A (NEC Corp.)/
07 February, 1995 (07.02.95) ,
Par. Nos. [0014] to [0019]
(Family: none)

1-9

| Y

JP 60-55640 A (Sanyo Electric Co., Ltd.),
30 March, 1985 (30.03.85),
Page 2, upper right column, lines 1 to 18
(Family: none)

1-9

A

JP 11-221684 A (Hamamatsu Photonics Kabushiki
Kaisha) ,

17 August, 1999 (17.08.99),
(Family: none)

1-9

Form PCT/ISA/210 (continuation of second sheet) (July 1998)

SB£fcBJiI## PCT/J P 0 3/1 1 6 26

A. &W<om-t%&W'<Dftm (BKtfNF&jH (IPC) )

Int. CI 7 H01L21/301 B28D5/00 B23K26/38 B23K101 :40

B. ^gfejTofc^g

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JP 2002-192370 A h *ifc£#tfc) 2 0
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JP 9-17756 A (ttS*£rttJ|C3£) 1997. 01. 17,
[0002], 100261 -[0034] (775!)^l)

JP 2002-226796 A ( 0 Stffcfifcl3i68nS£*|fc) 2 0 0
2. 08. 14, [0112], HI 6 (7r$9-4L)

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